Power Supply and Method of Supplying Power To Load

ABSTRACT

A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. Pat. Appl. No. 17/674,148,filed Feb. 17, 2022, pending, which is a continuation of U.S. Pat. Appl.No. 16/099,660, filed Nov. 7, 2018, now U.S. Pat. No. 11,290,028, issuedMar. 29, 2022, which is a continuation of and which claims priority toPCT/KR2018/006606, filed on Jun. 11, 2018, which claims priority toKorea Patent Application No. 10-2017-0079847, filed on Jun. 23, 2017,the entireties of which are incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates to electronic or electrical devices and,more particularly, to a power supply and a method of supplying power toa load.

BACKGROUND

Various electronic or electrical devices for use in living or industrialsites require a power supply. According to purposes, characteristics oruse environment of electronic or electrical device, the electronic orelectrical devices may require different types of power supply. Amongthe electronic or electrical devices, particularly, inductively coupledplasma (ICP) devices require an alternating current (AC) power supplyhaving high power and a high frequency.

The amount of power or current supplied to an inductively coupled plasmadevice needs to be controlled to precisely control the operation of theinductively coupled plasma device. Various methods have been studied tocontrol the amount of power current supplied to an inductively coupledplasma device. However, most of the methods increase the complexity,volume or price of a power supply. Alternatively, high-frequencyswitching noise is generated in a power supply or a stress is applied tothe power supply to cause malfunction of the power supply. Thus,reliability of the power supply is reduced or life of the power supplyis significantly reduced. Accordingly, there is a need for research intoa power supply and a method of supplying power which do not increasecomplexity and do not cause high-frequency switching noise and a stress.

SUMMARY

Example embodiments of the present disclosure provide a power supply anda method of supplying power which have improved reliability withoutincreasing complexity and causing high-frequency switching noise andstress.

A power supply according to an example embodiment of the presentdisclosure includes an inverter configured to direct current (DC) powerinto alternating current (AC) power, an impedance matching circuitconfigured to supply the AC power to a load; and a controller configuredto adjust disposition of a powering period, in which the AC power isoutput, and a freewheeling period, in which the AC power is not output,to adjust a power amount of the power supplied to the load through theimpedance matching circuit by the inverter.

In example embodiments, the controller may control the inverter toincrease the freewheeling period when the power amount of the powersupplied by the inverter is greater than a target power amount.

In example embodiments, the controller may control the inverter todecrease the freewheeling period when the power amount of the powersupplied by the inverter is smaller than a target power amount.

In example embodiments, the controller may increase or decrease thefreewheeling period step by step until the power amount of the powersupplied by the inverter becomes equal to a target power amount.

In example embodiments, the controller may detect a difference betweenthe power amount of the power supplied by the inverter and a targetpower amount and may adjust the freewheeling period according to thedetected difference such that the power amount of the power supplied bythe inverter becomes equal to a target power amount.

In example embodiments, the controller may calculate a differencebetween the power amount of the power supplied by the inverter and atarget power amount as an error value and adjusts the freewheelingperiod using a current error value, previous error values, andproportional-integral-derivation (PID) gain factors.

In example embodiments, the controller may limit a length of thefreewheeling period to a threshold value or less.

In example embodiments, the threshold value may be determined dependingon a quality factor of the impedance matching circuit and the load and aperiod of the AC power.

In example embodiments, the controller may control placement of thepowering period and the freewheeling period by placing a powering cellin which the AC power is supplied during at least one half cycle and afreewheeling cell in which the AC power is not supplied during at leastone half cycle.

In example embodiments, the controller may be configured to alternatelyarrange the powering cell and the freewheeling cell.

In example embodiments, the controller may limit the number ofsuccessively arranged freewheeling cells to a threshold value or less.

In example embodiments, the controller may control placement of thepowering period and the freewheeling period by placing a powering cellin which the AC power is supplied during at least one cycle and afreewheeling cell in which the AC power is not supplied and the AC poweris supplied during at least one cycle.

In example embodiments, the load may be an inductively coupled plasma(ICP).

In example embodiments, the controller may control the inverter tosupply positive voltage during a first half period, not to supply powerduring a second half period, to supply negative voltage during a thirdhalf period, and not to supply power during a fourth half period.

In example embodiments, the controller may control the inverter tosupply positive voltage during a first half period, to supply negativevoltage during a second half period, not to supply power during thirdand fourth half periods, to supply positive voltage during a fifth halfperiod, not to supply power during sixth and seventh half period, and tosupply negative voltage during an eighth half period.

In example embodiments, the inverter may include a first transistor anda first diode coupled in parallel between a power supply node and afirst output node, a second transistor and a second diode coupled inparallel between the first output node and a ground node, a thirdtransistor and a third diode coupled in parallel between the ground nodeand a second output node, a fourth transistor and a fourth diode coupledin parallel between the power supply node and the second output node,and an inductor coupled between the first output node and the secondoutput node. The first output node and the second output node may beconnected to the impedance matching circuit, and the controller maycontrol respective voltages of gates of the first to fourth transistors.

In example embodiments, the controller may control the inverter suchthat signs of a voltage and a current of the AC power match each otherand such that a positive peak value and a negative peak value of acurrent flowing through the inductor match each other.

A method of supply power to a load according to an example embodiment ofthe present disclosure includes receiving a target power amount,comparing a power amount of power supplied to the load with the targetpower amount, adjusting a powering period, in which alternating current(AC) power is supplied to the load, and a freewheeling period, in whichthe AC power is not supplied to the load, depending on a comparisonresult such that the target power amount and the power amount becomeequal to each other, and supplying power to the load according to theadjusted powering period and the adjusted freewheeling period.

In example embodiments, the powering period and the freewheeling periodmay be adjusted until the power amount and the target power amountbecome equal to each other.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure will become more apparent in view of the attacheddrawings and accompanying detailed description. The embodiments depictedtherein are provided by way of example, not by way of limitation,wherein like reference numerals refer to the same or similar elements.The drawings are not necessarily to scale, emphasis instead being placedupon illustrating aspects of the present disclosure.

FIG. 1 is a block diagram of a power supply system according to anexample embodiment of the present disclosure.

FIG. 2 is a detailed circuit diagram of an inverter, an impedancematching circuit, and a load according to an example embodiment of thepresent disclosure.

FIG. 3 illustrates an example in which a controller controls first tofourth switching signals.

FIG. 4 illustrates an example in which dead time is added to first tofourth switching signals.

FIG. 5 illustrates an example of waveforms of an output voltage and anoutput current depending on lapse of time when a frequency of the outputvoltage and a resonant frequency of a load match each other.

FIG. 6 illustrates an example of waveforms of an output voltage and anoutput current depending on lapse of time when a frequency of the outputvoltage is lower than a resonant frequency of a load.

FIG. 7 illustrates an operating state of an inverter when an outputvoltage transitions from a high level to a low level according to thewaveform of FIG. 6 .

FIG. 8 illustrates an example of waveforms of an output voltage and anoutput current depending on lapse of time when a frequency of the outputvoltage is higher than a resonant frequency of a load match each other.

FIG. 9 illustrates an operating state of an inverter when an outputvoltage transitions from a high level to a low level according to thewaveform of FIG. 8 .

FIG. 10 illustrates an example of a method of controlling powerdepending on DC voltage conversion.

FIG. 11 illustrates an example of a method of controlling powerdepending on phase change.

FIG. 12 illustrates an example in which first to fourth switchingsignals and an output voltage are adjusted depending on pulse widthmodulation.

FIG. 13 illustrates an example of a method of controlling powerdepending on pulse width modulation.

FIG. 14 illustrates a method of supplying power according to an exampleembodiment of the present disclosure.

FIG. 15 is a flowchart illustrating an example of a method ofcontrolling power according to an example embodiment of the presentdisclosure.

FIG. 16 illustrates an example of a method of supplying power accordingto an application embodiment of the present disclosure.

FIG. 17 illustrates another example of a method of supplying poweraccording to an application embodiment of the present disclosure.

FIG. 18 illustrates examples in which power is consumed according toquality factors.

FIG. 19 illustrates first and second lines after and before first timein more detail.

FIG. 20 illustrates an example in which a freewheeling period is dividedinto two or more periods.

FIG. 21 illustrates examples of a powering cell and freewheeling cells.

FIG. 22 illustrates other examples of a powering cell and freewheelingcells.

FIG. 23 illustrates an example in which a ripple is generated bypowering cells and freewheeling cells.

FIG. 24 illustrates an example in which a ripple is suppressed in anoutput current.

FIG. 25 illustrates an inverter, an impedance matching circuit, and aload according to an application example of the present disclosure.

FIG. 26 illustrates variations in an output current and an inductorcurrent with the lapse of time.

FIG. 27 illustrates an example of a variation in an inductor currentwhen an output voltage has a freewheeling period.

FIG. 28 illustrates another example of a variation in an inductorcurrent when an output voltage has a freewheeling period.

FIG. 29 illustrates another example of a variation in an inductorcurrent when an output voltage has a freewheeling period.

FIG. 30 illustrates an inverter, an impedance matching circuit, and aload according to an application example of the present disclosure inmore detail.

DETAILED DESCRIPTION

Example embodiments of the present disclosure will now be describedbelow more fully with reference to accompanying drawings. The presentdisclosure may, however, be embodied in different forms and should notbe constructed as limited to the embodiments set forth herein. Rather,these embodiments are provided so that this disclosure will be thoroughand complete, and will fully convey the scope of the present inventionto those skilled in the art.

Reference numerals are indicated in detail in example embodiments of thepresent disclosure, and their examples are represented in referencedrawings. In every possible case, like reference numerals are used forreferring to the same or similar elements in the description anddrawings.

FIG. 1 is a block diagram of a power supply system 100 according to anexample embodiment of the present disclosure. Referring to FIG. 1 , thepower supply system 100 includes AC power 110, a power supply 120, and aload 140. The AC power 110 may be a 60 Hz power used in a house or anindustrial field. The load 140 may be an electrical or electronic deviceused in a house or an industrial field. For example, the load 140 may bean inductively coupled plasma (ICP) device.

The power supply 120 may convert first AC power into second AC power andmay supply the second AC power to the load 140. For example, the secondAC power may have a frequency of several hundreds of kilohertz (kHz) totens of megahertz (MHz) and may have power of several kilowatts (kW) ormore. The power supply 120 may include a rectifier 121, a capacitor 122,an inverter 123, an impedance matching circuit 130, and a controller125.

The rectifier 121 may convert an output of the AC power 110 into DCpower. For example, the rectifier 121 may supply DC power between aground node GND and a power supply node VP. The capacitor 122 may beconnected between the power supply node VP and the ground node GND. Thecapacitor 122 may discharge an AC component transmitted to the powersupply node VP to the ground node GND.

The inverter 123 may receive the DC power from the power supply node VPand the ground node GND. The inverter 123 may receive switching signalsSW from the controller 125. The inverter 123 may convert the DC powerinto second AC power in response to the switching signals SW. The secondAC power may be supplied to the load 140 through the impedance matchingcircuit 130. The impedance matching circuit 130 may provide matching foran impedance of the load 140.

The controller 125 may transmit the switching signals SW to the inverter123. The controller 125 may control the switching signals SW such thatthe inverter 123 converts the DC power to the second AC power. Thecontroller 125 may also control the switching signals SW to regulate theamount of power supplied from the inverter 123 to the load 140. Forexample, the controller 125 may control the switching signals SW suchthat the inverter 123 supplies power through powering and freewheelingperiods according to an example embodiment. The powering and thefreewheeling periods will be described below in more detail.

FIG. 2 is a detailed circuit diagram of an inverter 123, an impedancematching circuit 130, and a load 140 according to an example embodimentof the present disclosure. Referring to FIGS. 1 and 2 , the inverter 123may include first to fourth transistors TR1 to TR4 and first to fourthdiodes D1 to D4.

The first and second transistors TR1 and TR2 may be coupled in seriesbetween a power supply node VP and a ground node GND. The first diode D1may be connected in parallel to the first transistor TR1, and the seconddiode D2 may be connected in parallel to the second transistor TR2. Thethird and fourth transistors TR3 and TR4 may be coupled in seriesbetween the ground node GND and the power supply node VP. The thirddiode D3 may be connected in parallel to the third transistor TR3, andthe fourth diode D4 may be connected in parallel to the fourthtransistor TR4. As an example, the first to fourth diodes D1 to D4 maybe body diodes or Schottky diodes.

First to fourth switching signals SW1 to SW4 may be transmitted to gatesof the first to fourth transistors TR1 to TR4, respectively. That is,the first to fourth transistors TR1 to TR4 may operate in response tothe first to fourth switching signals SW1 to SW4, respectively. Thefirst to fourth switching signals SW1 to SW4 may correspond to theswitching signals SW shown in FIG. 1 .

A node between the first and second transistors TR1 and TR2 and a nodebetween the third and fourth transistors TR3 and TR4 may be outputnodes. The output nodes may transmit an output voltage VO to theimpedance matching circuit 130 and the load 140. The output nodes maytransmit an output current IO to the impedance matching circuit 130 andthe load 140.

As an example, the impedance matching circuit 130 may include acapacitor C. However, an internal configuration of the impedancematching circuit 130 is not limited to a single capacitor. As anexample, the load 140 may be an inductively coupled plasma (ICP) device.The load 140 may be modeled as an inductor Lpla and a resistor Rpla. Thecapacitor C, the inductor Lpla, and the resistor Rpla may be coupled inseries between the output nodes of the inverter 123.

FIG. 3 illustrates an example in which a controller 125 controls firstto fourth switching signals SW1 to SW4.

In FIG. 3 , horizontal axes indicate time T and vertical axes indicatefirst to fourth switching signals SW 1 to SW 4 and an output voltage. Aunit of the vertical axes may be a voltage V. Referring to FIGS. 1 to 3, the first and third switching signals SW1 and SW3 are controlled in asingle pair, and the second and fourth switching signals SW2 and SW4 maybe controlled in a single pair

When the first switching signal SW1 has a high level, the thirdswitching signal SW3 may also have a high level. When the firstswitching signal SW1 has a low level, the third switching signal SW3 mayalso have a low level. Similarly, when the second switching signal SW2has a high level, the fourth switching signal SW4 may also have a highlevel. When the second switching signal SW2 has a low level, the fourthswitching signal SW4 may also have a low level.

The first and third switching signals SW1 and SW3 and the second andfourth switching signals SW2 and SW4 may be complementarily controlled.For example, when the first and third switching signals SW1 and SW3 havea high level, the second and fourth switching signals SW2 and SW4 mayhave a low level. When the first and third switching signals SW1 and SW3have a low level, the second and fourth switching signals SW2 and SW4may have a high level.

When a specific switching signal has a high level, a transistor to whichthe specific switching signal is transmitted may be turned on. When aspecific switching signal has a low level, a transistor to which thespecific switching signal is transmitted may be turned off.

When the first and third transistors TR1 and TR3 are turned on and thesecond and fourth transistors TR2 and TR4 are turned off, the firsttransistor TR1 may transmit a voltage at a power supply node VP and thethird transistor TR3 may transmit a voltage at a ground node GND. Thus,the output voltage VO may have a positive value while the output currentIO may have a positive value. That is, the output current IO may flow ina direction shown in FIG. 2 .

When the first and third transistors TR1 and TR3 are turned off and thesecond and fourth transistors TR2 and TR4 are turned on, the secondtransistor TR2 may transmit a voltage at the ground node GND and thefourth transistor TR4 may transmit a voltage at the power supply nodeVP. Thus, the output voltage VO may have a negative value while theoutput current IO may have a negative value. That is, the output currentmay flow in a reverse direction of the direction shown in FIG. 2 .

FIG. 4 illustrates an example in which dead time DT is added to first tofourth switching signals SW1 to SW4. In FIG. 4 , horizontal axesindicate time T and vertical axes indicate first to fourth switchingsignals SW1 to SW4 and an output voltage VO. A unit of the vertical axesmay be a voltage V.

As compared to FIG. 3 , there is a dead time DT between a time point atwhich the first and third switching signals SW1 and SW3 transition froma high level to a low level and a time point at which the second andfourth switching signals SW2 and SW4 transition from a low level to ahigh level. Similarly, there is a dead time DT between a time point atwhich the first and third switching signals SW1 and SW3 transition froma low level to a high level and a time point at which the second andfourth switching signals SW2 and SW4 transition from a high level to alow level.

For the dead time DT, the first to fourth switching signals SW1 to SW4all have low levels. That is, the first to fourth transistors TR1 to TR4are turned off. The dead time DT may prevent the power supply node VPand the ground node GND from being short-circuited. For the dead timeDT, the output voltage VO may have a level determined depending on avoltage and a current before the dead time DT and the operation timingof the first to fourth transistors TR1 to TR4.

Hereinafter, to avoid the complexity of description, first to fourthswitching signals SW1 to SW4 and an output voltage VO will be shownwhile omitting dead time DT unless the dead time DT is necessary forexplanation of the present inventive concepts. Even when the dead timeDT is not explicitly shown or mentioned, it is not interpreted that thedead time DT is not intended to exist.

FIG. 5 illustrates an example of waveforms of an output voltage VO andan output current IO depending on lapse of time T when a frequency fswof the output voltage VO and a resonant frequency f0 of a load 140 matcheach other. Referring to FIGS. 1, 2, and 5 , phases of the outputvoltage VO and the output current IO may match each other when thefrequency fsw of the output voltage VO and the resonant frequency f0 ofthe load 140 match each other.

As an example, the resonant frequency f 0 of the load 140 may bedetermined by an inductor Lpla of the load 140 and a capacitor C of theimpedance matching circuit 130. The resonant frequency f0 of the load140 may be determined by Equation (1).

$f0 = \frac{1}{2\pi\sqrt{Lpla \bullet C}}$

FIG. 6 illustrates an example of waveforms of an output voltage VO andan output current IO depending on lapse of time T when a frequency fswof the output voltage VO is lower than a resonant frequency f0 of a load140. Referring to FIGS. 1, 2, and 6 , a phase of the output voltage VOmay lag behind a phase of the output current IO when the frequency fswof the output voltage VO is lower than the resonant frequency f0 of aload 140.

FIG. 7 illustrates an operating state of an inverter 123 when an outputvoltage VO transitions from a high level to a low level according to thewaveform of FIG. 6 . Referring to FIGS. 4, 6, and 7 , there may be deadtime DT when the output voltage VO transitions from a high level to alow level. For the dead time DT, the first to fourth transistors TR1 toTR4 may be turned off.

The output current IO flows to the inverter 123 from the load 140 andthe impedance matching circuit 130. Due to a direction of the outputcurrent IO, the second and fourth diodes D2 and D4 do not pass thecurrent, and the first and third diodes D1 and D3 pass the current. Thatis, when the phase of the output voltage VO lags behind the phase of theoutput current IO, the output current IO flows to the inverter 130 fromthe load 140 and the impedance matching circuit 130 for the dead timeDT.

As the output current IO flows, power may unnecessarily consumed.Moreover, as the output current IO flows, the output voltage VO of theinverter 123 is maintained at a voltage difference between the powersupply node VP and the ground node GND. The output voltage VO is appliedto opposite ends of each of the second and fourth transistors TR2 andTR4.

When the dead time DT finishes, the second and fourth transistors TR2and TR4 are turned on while a high voltage (for example, the outputvoltage VO) is applied to opposite ends of each of the second and fourthtransistors TR2 and TR4, which may be an unnecessary stress applied tothe second and fourth transistors TR2 and TR4 and may degrade the secondand fourth transistors TR2 and TR4.

Since the first to fourth transistors TR1 to TR4 of the inverter 123 aresymmetrically disposed, the same phenomenon may occur in the first andthird transistors TR1 and TR3. For example, for the dead time DT whenthe output voltage VO transitions from a low level to a high level,power may be unnecessarily consumed and a stress may generated in thefirst and third transistors TR1 and TR3.

FIG. 8 illustrates an example of waveforms of an output voltage VO andan output current IO depending on lapse of time T when a frequency fswof the output voltage VO is higher than a resonant frequency f0 of aload 140 match each other. Referring to FIGS. 1, 2, and 8 , a phase ofthe output voltage VO may lead a phase of the output current IO when thefrequency fsw of the output voltage VO is higher than the resonantfrequency f0 of the load 140.

FIG. 9 illustrates an operating state of the inverter 123 when an outputvoltage VO transitions from a high level to a low level according to thewaveform of FIG. 8 . Referring to FIGS. 4, 8 and 9 , there may be deadtime DT when the output voltage VO transitions from a high level to alow level. For the dead time DT, the first to fourth transistors TR1 toTR4 may be turned off.

Since the output current IO has a positive value, the output current IOflows from the inverter 123 to the impedance matching circuit 130 andthe load 140. A direction of the output current IO may prevent theoutput current IO from flowing through the first to fourth diodes D1 toD4. Instead, the output current IO may flow through parasitic capacitors(not shown) of the first and third transistors TR1 and TR3.

As the output current IO flows, opposite end voltages of each of thefirst and third transistors TR1 and TR3 may increase by a voltagedifference between the power supply node VP and the ground node GND.Resonance (for example, parasitic resonance) may occur due to theparasitic capacitors (not shown) of the first and third transistors TR1and TR3 and parasitic inductors (not shown) of wirings when the outputcurrent IO flows. The parasitic resonance increases as the intensity ofthe output current IO increases, and may high-frequency switching noise.

While the output current flows through the first and third transistorsTR1 and TR3, the first and third transistors TR1 and TR3 are turned offat the dead time DT, which may act as a stress on the first and thirdtransistors TR1 and TR3. Since the first to fourth transistors TR1 toTR4 are symmetrically disposed, the same high-frequency switching noiseand stress may be generated in the second and fourth transistors TR2 andTR4 when the output voltage VO transitions from the low level to thehigh level.

As described above, when the frequency fsw of the output voltage VO isdifferent from the resonant frequency f0 of the load 140, a stress maybe applied to the first to fourth transistors TR1 to TR4 or power may beunnecessarily consumed. Thus, the frequency fsw of the output voltage VOshould be controlled similarly to the resonant frequency f0 of the load140 to improve reliability and performance of the power supply 120.

In detail, the frequency fsw of the output voltage VO is slightly higher(for example, about 0.1 to 10 percent) than the resonance frequency f0of the load 140. When the frequency fsw of the output voltage VO isslightly higher than the resonance frequency f0 of the load 140, theinstantaneous intensity of the output current IO have a fine positivevalue (for example, 0.1 percent to 10 percent of a maximum) in the stateof the dead time DT of FIG. 8 .

In the situation described with reference to FIGS. 8 and 9 , the firstand third transistors TR1 and TR3 are turned off while a minute currentflows. Therefore, the stress applied to the first and third transistorsTR1 and TR3 is negligible. For the dead time DT, as the output currentIO flows, the opposite end voltages of each of the first and thirdtransistors TR1 and TR3 increase by a voltage difference between thepower supply node VP and the ground node GND .

For the dead time DT, opposite end voltages of each of the second andfourth transistors TR2 and TR4 decrease to 0 volt (or a similar lowvolt) as the output current IO flows. That is, when the dead time DTfinishes and the second and fourth transistors TR2 and TR4 are turnedon, the opposite end voltages of each of the second and fourthtransistors TR2 and TR4 are 0 volt. Therefore, the second and fourthtransistors TR2 and TR4 are negligible.

Likewise, when the phase of the output voltage VO is controlled tominutely lead the phase of the output current IO (for example, 0.1% to10%), transistors may perform a preferable switching operation calledzero voltage nearly zero current switching (ZVZCS). According to theZVZCS, the first to fourth transistors TR1 to TR4 of the inverter 123may be stably controlled. The controller 125 may control the first tofourth switching signals SW1 to SW4 according to the ZVZCS.

Power supplied to the load 140, for example, the amount of power may becontrolled to precisely control the operation of the load 140. Variousmethods may be used to control the power supplied to the load 140. FIG.10 illustrates an example of a method of controlling power depending onDC voltage conversion. Referring to FIG. 10 , a maximum value of theoutput voltage VO may be adjusted according to the DC voltageconversion.

When DC voltage conversion is used, phases of an output voltage VO andan output current IO are maintained in an unchanged state. Thus, anadvantage that the operation of the inverter 123 is stable is provided.Meanwhile, when the DC voltage conversion is used, a separate DC-DCconverter is required to perform DC voltage conversion of a power supplynode VP. Additionally, there are disadvantages in that a time isrequired to perform DC-DC conversion and power control speed is slow.

FIG. 11 illustrates an example of a method of controlling powerdepending on phase change. Referring to FIG. 11 , a difference in phasebetween an output voltage VO and an output current IO may be adjustedaccording to phase conversion. When an area of an overlapping region isdecreased by the difference in phase between the output voltage VO andthe output current IO, power supplied to the load 140 is decreased.Accordingly, the power supplied to the load 140 may be adjusted byadjusting a frequency fsw of the output voltage VO.

Since the power is adjusted by adjusting the frequency fsw of the outputvoltage VO, the power may be adjusted relatively rapidly. However, whenthe phases of the output voltage VO and the output current IO aredifferent, a stress may be applied to the first to fourth transistorsTR1 to TR4, as described with reference to FIGS. 5 to 9 . Thus,stability of the inverter 123 may be degraded.

FIG. 12 illustrates an example in which first to fourth switchingsignals SW1 to SW4 and an output voltage VO are adjusted depending onpulse width modulation. Referring to FIGS. 2 and 12 , first and secondswitching signals SW1 and SW2 may have the same phases as phasesdescribed with reference to FIG. 3 . Third and fourth switching signalsSW3 and SW4 may have phases leading phases described with reference toFIG. 3 .

The output voltage VO has a high level when the first and thirdswitching signals SW1 and SW3 together have a high level. When the phaseof the third switching signal SW3 leads the phase of the first switchingsignal SW1, a period in which the first and third switching signals SW1and SW3 have a high level together is reduced. Thus, a period in whichthe output voltage VO has the high level is reduced.

The output voltage VO has a low level when the second and fourthswitching signals SW2 and SW4 together have a high level. When the phaseof the fourth switching signal SW4 leads the phase of the secondswitching signal SW2, a period in which the second and fourth switchingsignals SW2 and SW4 have a high level together is reduced. Thus, aperiod in which the output voltage VO is low is reduced.

FIG. 13 illustrates an example of a method of controlling powerdepending on pulse width modulation. Referring to FIG. 13 , a pulsewidth of an output voltage VO may be adjusted by pulse width modulation.When an overlapping region between the output voltage VO and the outputcurrent IO is reduced, power supplied to the load 140 is reduced. Thus,the power supplied to the load 140 may be adjusted by modulating thepulse width of the output voltage VO.

However, in a case in which the pulse width of the output voltage VO isreduced, some of the first to fourth transistors TR1 to TR4 may beswitched when the output current IO has a positive value or a negativevalue. Accordingly, a stress may be applied to the first to fourthtransistors TR1 to TR4 and stability of the inverter 123 may be reduced.

FIG. 14 illustrates a method of supplying power according to an exampleembodiment of the present disclosure. Referring to FIGS. 1, 2 and 14 ,the controller 125 may adjust power (for example, the amount of power)supplied to the load 140 through freewheeling insertion. As an example,six cycles of the output voltage VO are shown in FIG. 14 . To describethe present inventive concept, it will be assumed that six cycles are aunit time. However, the unit time for adjusting the amount of power isnot limited to the six periods of the output voltage VO.

In a high power mode (HPM), the controller 125 may control the first tofourth switching signals SW1 to SW4 using the method described withreference to FIG. 3 or FIG. 4 . The output voltage VO may continuouslytransition, and the output current IO may also continuously transition.In a low power mode (LPM), the controller 125 may control the first tofourth switching signals SW1 to SW4 according to a powering period and afreewheeling period.

The powering period may include first and second powering periods P1 andP2. In the first and second powering periods P1 and P2, the controller125 may control the first to fourth switching signals SW1 to SW4 usingthe method described with reference to FIGS. 3 or 4 . The freewheelingperiod may include a first freewheeling period F1. During the firstfreewheeling period F1, the controller 125 may control the first tofourth switching signals SW1 to SW4 in such a manner that the outputvoltage VO does not have a high level and a low level (for example, hasa ground level).

For example, during the first freewheeling period F1, the controller 125may maintain the first through fourth switching signals SW1 to SW4 atlow levels. Since the output voltage VO is not supplied, the amount ofthe output current IO during the first freewheeling period F1 may besmaller than the amount of the output current IO during the first andsecond powering periods P1 and P2. The inverter 123 supplies power tothe load 140 during the first and second powering periods P1 and P2, butdoes not supply power to the load 140 during the first freewheelingperiod F1.

The controller 125 may adjust an entire length of the powering periodand an entire length of the freewheeling period for a unit time tocontrol the amount of power supplied to the load 140 for the unit time.The longer the freewheeling period, the smaller the amount of powersupplied to the load 140. The shorter freewheeling period, the greaterthe amount of power supplied to the load 140. As an example, the poweramount P may be calculated by Equation (2).

$P = \left( {\frac{1}{\sqrt{2}} \times \frac{4}{\pi} \times VVP \times \frac{\left( {N - n} \right)}{N}} \right)^{2} \times \frac{1}{Rpla}$

In Equation (2), VVP denotes a voltage at the power supply node VP, Ndenotes the number of all periods included in the unit time, and ndenotes the number of all freewheeling periods included in the unittime. As an example, when the freewheeling period is adjusted in unitsof half cycle, N and n may be changed to the number of half cycles. Asshown in Equation (2), the power amount P may be adjusted depending on alength of the powering period, that is, a length of the freewheelingperiod.

As an example, the freewheeling period may be distinguished from a deadtime DT (see FIG. 4 ) in that the freewheeling period has a lengthlonger than or equal to a half cycle of the output voltage VO. The deadtime DT may be shorter than the half cycle of the output voltage VO.When the dead time DT has a length corresponding to the half cycle ofthe output voltage VO, the phases of the output voltage VO and theoutput current IO are changed in each cycle. Thus, the power supply 120does not operate normally.

FIG. 15 is a flowchart illustrating an example of a method ofcontrolling power according to an example embodiment of the presentdisclosure. Referring to FIGS. 1, 2, and 15 , in operation S110, thecontroller 125 may receive information on a target power amount (or atarget current amount). For example, the controller 125 may receive atarget power amount (or a target current amount) through communicationwith an external device or through a user terminal receiving informationfrom a user.

In operation S120, the controller 125 determines whether the targetpower amount is less than a current power amount. When the target poweramount is less than the current power amount, the controller 125 may adda freewheeling cell in operation S130. For example, the freewheelingcell may be used to increase a length of the freewheeling period and mayinclude a freewheeling period corresponding to at least one half cycle.The powering period having the corresponding length for the unit timemay decrease by the added freewheeling cell. Then, the controller 125may perform operation S160.

When the target power amount is not less than the current power amount,the controller 125 may determine whether the target power amount isgreater than the current power amount in operation S140. When the targetpower amount is greater than the current power amount, the controller125 may decrease the freewheeling cell in operation S150. For example,the controller 125 decrease a single freewheeling cell for a unit timeand the powering period having the corresponding length may beincreased. Then, the controller 125 may perform operation S160.

In operation S160, the controller 125 determines whether the targetpower amount is equal to the current power amount. When the target poweramount is not equal to the current power amount, the controller 125 mayperform operation S120. When the target power amount is equal to thecurrent power amount, the controller 125 may terminate the powercontrol. As an example, in the case of the power supply system 100 inwhich the current power amount varies depending on an environmentalchange, the controller 125 may return to operation S110 to continue toperform power supply monitoring, instead of termination of poweradjustment.

FIG. 16 illustrates an example of a method of supplying power accordingto an application embodiment of the present disclosure. Referring toFIGS. 1, 2, and 16 , in operation S210, the controller 125 may receiveinformation on target power amount (or target current amount). Inoperation S220, the controller 125 may calculate a difference betweenthe target power amount and the current power amount. In operation S230,the controller 125 may adjust the number of freewheeling cells based onthe calculated difference.

As an example, the controller 125 may store a look-up table indicatingthe number of freewheeling cells to increase or decrease depending on adifference in the amount of power. The controller 125 may adjust thenumber of freewheeling cells with reference to the lookup table. Asanother example, the controller 125 may include an operator configuredto operate a function that calculates the number of freewheeling cellsto increase or decrease depending on a difference in the amount ofpower. The controller 125 may adjust the number of freewheeling cellsusing an operator.

FIG. 17 illustrates another example of a method of supplying poweraccording to an application embodiment of the present disclosure.Referring to FIGS. 1, 2, and 17 , in operation S310, the controller 125may receive information of target power amount (or target currentamount). In operation S320, the controller 125 may calculate adifference between the target power amount and current power amount asan error value.

In operation S330, the controller 125 determines whether a current errorvalue (for example, an error value calculated in operation S320 of acurrent loop), previous error values (for example, error valuescalculated in one or more previous loops), and PIDproportional-integral-derivation (PID) gain factors. As an example, thenumber of freewheeling cells may be calculated by Equation (3).

$\begin{array}{l}{n\lbrack k\rbrack = n\left\lbrack {k - 1} \right\rbrack + \left( {Kp + Ki + Kd} \right)e\lbrack k\rbrack + \left( {- Kp - 2kd} \right)e\left\lbrack {k - 1} \right\rbrack +} \\{Kd \bullet e\left\lbrack {k - 2} \right\rbrack}\end{array}$

In Equation (3), n[k] denotes the number of cycles of powering periodincluded in a current loop, that is, a current unit time, n[k-1] denotesthe number of cycles of a powering period included in just a previousloop, that is, a previous unit time, e[k] denotes an error valuecalculated in a current loop, that is, a current unit time, e[k-1]denotes an error value calculated in a first previous loop, i.e., afirst previous unit time, e[k-2] denotes an error value calculated in asecond previous loop, that is, a second previous unit time, and Kp, Ki,and Kd denote PID gain factors.

In operation S340, the controller 125 determines whether the adjustmentis completed. For example, the controller 125 may determine whether anerror value of a current loop falls within a predetermined range. Whenthe error value of the current loop falls within the predeterminedrange, the controller 125 may finish adjusting the amount of power. Whenthe error value of the current loop does not fall within thepredetermined range, the controller 125 may perform the next loop. As anexample, a single loop may include operations S320 and S330.

As described above, according to an example embodiment, a length of thefreewheeling interval (or powering interval) included in the unit timemay be adjusted to control the amount of power supplied to the load 140.Since freewheeling insertion is performed by adjusting the timing atwhich the first to fourth switches SW1 and SW4 have a high level, aseparate complex device is not required, and the freewheeling insertionmay be easily performed while maintaining a difference in phase betweenthe output voltage VO and the the output current IO.

Referring again to FIG. 14 , power is not supplied to the load 140during a first freewheeling period F1. When the first freewheelingperiod F1 is excessively prolonged, the power supplied to the load 140may be entirely consumed and the load 140 may be turned off. FIG. 18illustrates examples in which power is consumed according to qualityfactors. In FIG. 18 , horizontal axes denote time T and vertical axesdenote an output voltage VO and an output current IO.

Referring to FIGS. 1, 2, and 18 , a first line L1 indicates an outputcurrent IO when the quality factor Q is 15 and a second line L2indicates an output current IO when the quality factor Q is 5. Thequality factor Q may be determined by a capacitor C of the impedancematching circuit 130, resistance Rpla of the load 140, and an inductorLpla. The quality factor (Q) may be calculated by Equation (4).

$Q = \frac{\sqrt{{Lpla}/C}}{Rpla}$

At the first time T1, the inverter 123 enters a freewheeling periodunder the control of the controller 125. As the power output by theinverter 125 is cut off, an amount of the current supplied to the load140 begins to be decreased. When the power charged in the impedancematching circuit 130 and the load 140 is entirely consumed, the outputcurrent IO does not flow any longer. As shown by the first line L1 andthe second line L2, the output current IO is cut off more rapidly whenthe quality factor Q is low. That is, the charged power is consumed morerapidly.

FIG. 19 illustrates the first and second lines L1 and L2 after andbefore the first time T1 in more detail. Referring to FIGS. 1, 2, and 19, the output current IO at the first time T1 may be decreased accordingto Equation (5).

$I0 = e^{- \frac{t}{\tau}} \times Ipeak \times \cos\left( {\omega t - \theta} \right)$

In Equation (5), ω denotes a resonant frequency of the load 140, tdenotes time, θ denotes a phase of the output current IO, Ipeak denotesa peak value of the output current IO of a powering period, and τdenotes a time constant and may be calculated by Equation (6).

$\tau = \frac{2Q}{\omega} = \frac{Q}{\pi} \times T$

In Equation (6), T denotes a single period of the output voltage VO orthe output current IO. Referring to Equations (5) and (6) and FIG. 19 ,the output current IO has an envelope that decreases exponentiallydepending on the time constant τ after the first time T1. As an example,a time point at which the magnitude of the envelope of the outputcurrent IO decreases to 10% of the maximum value is 0.73 QT.

When a lower limit of the power supplied to the load 140 in an operatingstate is set to 10% of a maximum, a length of a freewheeling period mayhave an upper limit of 0.73 QT. The upper limit of the freewheelingperiod may be determined by a period of the quality factor Q and theoutput voltage VO or the output current IO. As an example, when thequality factor Q of the load 140 varies in real time, an upper limit ofthe freewheeling period may also vary in real time. In this case, theupper limit of the freewheeling period may be determined based on a timeat which the quality factor Q is lowest.

For example, the quality factor Q may vary in real time while the load140 operates and the lower limit of the quality factor Q may be 5. Inthis case, the upper limit of the freewheeling period may be 3.65 T. Theupper limit of the freewheeling period may be determined to be 3.65 T,regardless of what state the load 140 is in and what the quality factor(Q) of the load 140 has.

In the case in which a required length of the freewheeling period isgreater than the upper limit of the freewheeling period, the controller125 may divide the freewheeling period into two or more freewheelingperiods. FIG. 20 illustrates an example in which a freewheeling periodis divided into two or more periods. Referring to FIGS. 1, 2 and 20 ,the controller 125 may locate a first freewheeling period F1 betweenfirst and second powering periods P1 and P2. The controller 125 maylocate a second freewheeling period F2 between second and third poweringperiods P2 and P3.

When the second powering period P2 is located between the first andsecond freewheeling periods F1 and F2, power is supplied to the load 140during the second powering period P2. Thus, the load 140 is preventedfrom being turned off by the first freewheeling period F1 or the secondfreewheeling period F2.

As an example, first power may be present in the load 140 when the load140 is fully charged. Second power may be present in the load 140 whenthe power charged in the load 140 by the freewheeling period ispartially consumed. The power charged in the load 140 may be less thanthe first power even when the power is charged in the load 140 for asingle period after the freewheeling period (that is, by the poweringperiod).

Accordingly, the controller 140 may set the upper limit of the firstfreewheeling period F1 and the upper limit of the second freewheelingperiod F2 to be different from each other. For example, the controller125 may set the upper limit of the second freewheeling period F2 to beshorter than the upper limit of the first freewheeling period F1. Asanother example, the controller 125 may set a lower limit to the secondpowering period P2 between the first and second freewheeling periods F1and F2. For example, the controller 125 may set a lower limit of thesecond powering period P2 such that the power of the load 140 rises tothe first power during the second powering period P2.

FIG. 21 illustrates examples of a powering cell PC and freewheelingcells FC1 to FC3. Referring to FIGS. 1, 2, and 21 , the powering cell PCmay include a single period in which the output voltage VO fully swings.The first freewheeling cell FC1 may include a single period in which theoutput voltage VO is in a ground level.

The second freewheeling cell FC2 may have a half cycle in which theoutput voltage VO is in a ground level and a half cycle in which theoutput voltage VO is in a low level. The third freewheeling cell FC3 mayinclude a half cycle in which the output voltage VO is in a high leveland a half cycle in which the output voltage VO is in a ground level.The controller 125 may select one of the first to third freewheelingcells FC1 to FC3 to more precisely control the amount of power suppliedto the load 140.

For example, during the powering cell (PC), the inverter 123 may supplyan amount power of 1 (one). During the first freewheeling cell FC1, theinverter 123 may supply an amount of power of 0 (zero). During thesecond freewheeling cell FC2 or the third freewheeling cell FC3, theinverter 123 may supply an amount of power of 0.5. The controller 125may combine the powering cell PC with the first to third freewheelingcells FC1 to FC3 to control the amount of power supplied to the load 140in a plurality of steps.

As an example, as shown in the second and third freewheeling cells FC2and FC3, the freewheeling cell may include at least one half cycle inwhich the output voltage VO is in a high or low level. During the atleast one half cycle, the inverter 123 supplies power to the load 140.Accordingly, as described with reference to FIGS. 18 to 19 , the load140 may be prevented from being turned off by the freewheeling periodeven when an upper limit of the freewheeling period is not set.

FIG. 22 illustrates other examples of a powering cell and freewheelingcells.

Referring to FIGS. 1, 2, and 22 , each of the powering cell PC and thefreewheeling cells FC1 to FC5 may include two periods of the outputvoltage VO or the output current IO. The freewheeling cells FC1 to FC5include at least one half cycle in which the output voltage VO has ahigh level or a low level and at least one half cycle in which theoutput voltage VO has a ground level.

As shown in FIG. 22 , the freewheeling cells FC1 to FC5 may have variouspatterns. The patterns of the output voltage VO of the freewheelingcells FC1 to FC5 are not limited. The number of periods of the outputvoltage VO or the output current IO included in each of the freewheelingcells FC1 to FC5 is not limited.

FIG. 23 illustrates an example in which a ripple is generated bypowering cells and freewheeling cells. In FIG. 23 , a vertical axisdenotes time T and a horizontal axis denotes an output voltage VO or anoutput current IO. In FIG. 23 , red lines denote the output voltage VOand blue lines denote the output current IO.

Referring to FIGS. 1, 2 and 23 , the controller 125 may continuouslyarrange freewheeling cells FC and may successively arrange poweringcells PC. When the freewheeling cells FC are successively arranged, adensity of the output voltage VO decreases and the amount of the outputcurrent IO decreases. When the powering cells PC are successivelyarranged, the density of the output voltage VO increases and the amountof the output current IO increases.

That is, when the freewheeling cells FC are arranged to be concentratedand the powering cells PC are arranged to be concentrated, ripples mayoccur in the output current IO. When a ripple occurs in the outputcurrent IO, it may become difficult to calculate the current amount ofpower.

FIG. 24 illustrates an example in which a ripple is suppressed in anoutput current. In FIG. 24 , a vertical axis denotes time T and ahorizontal axis denotes an output voltage VO or an output current IO. InFIG. 24 , red lines denote the output voltage VO and blue lines denotethe output current IO.

Referring to FIGS. 1, 2, and 24 , the controller 125 may locate afreewheeling cell FC next to a powering cell PC and locate a poweringcell PC next to the freewheeling cell FC. For example, the controller125 may alternately locate a freewheeling interval included in thefreewheeling cell FC and a powering interval included in the poweringcell PC. When the freewheeling cell FC and the powering cell PC arealternately located, ripples of the output current IO may be suppressedand the amount of power may be easily calculated.

FIG. 25 illustrates an inverter 123′, an impedance matching circuit 130,and a load 140 according to an application example of the presentdisclosure. Referring to FIGS. 1 and 25 , the inverter 123′ may includefirst to fourth transistors TR1 to TR4, first to fourth diodes D1 to D4,and an inductor Lzvs.

As compared to the inverter 123 in FIG. 2 , the inverter 123′ furtherincludes an inductor Lzvs. The inductor Lzvs may be coupled betweenoutput nodes to which the output voltage VO is output. A current flowingthrough the inductor Lzvs may be an inductor current Izvs. The first tofourth transistors TR1 to TR4 and the first to fourth diodes D1 to D4may be connected and operate the same as those described with referenceto FIG. 2 .

FIG. 26 illustrates variations in an output current IO and an inductorcurrent Izvs with the lapse of time T. FIGS. 1, 25, and 26 , a phase ofthe output voltage VO may match a phase of the output current IO. Theinductor current Izvs may act as a counter electromotive force of theoutput current IO. The inductor current Izvs has a negative value whenthe output current IO increases, and the inductor current Izvs may havea positive value when the output current IO decreases.

When the phases of the output voltage VO and the output current IO matcheach other, the output current IO may not flow during a dead time DT(see FIG. 4 ) in which the output voltage VO transitions from a highlevel to a low level. At this point, a positive current flows in theinverter 123′ due to the inductor current Izvs.

Similarly, when the phases of the output voltage VO and the outputcurrent IO match each other, the output current IO may not flow during adead time in which the output voltage VO transitions from a low level toa high level. At this point, a negative current flows in the inverter123′ due to the inductor current Izvs. Zero voltage nearly zero currentswitching (ZVZCS) may be achieved in the inverter 123′ due to theinductor current Izvs.

FIG. 27 illustrates an example of a variation in an inductor currentIzvs when an output voltage VO has a freewheeling period. Referring toFIGS. 1, 25, and 27 , a powering period of one cycle and a freewheelingperiod of one cycle may be alternately arranged. The inductor currentIzvs may be calculated using Equation (7).

$I_{ZVS} = Iini + \frac{1}{L_{ZVS}}{\int_{0}^{\tau}{VO(t)dt}}$

In Equation (7), Iini denotes an initial current. During thefreewheeling interval, the inductor current Izvs remains negative. Sincethe sum total (or average current) of the inductor currents Izvs shouldbe zero, an absolute value of a positive peak value of the inductorcurrent Izvs may be greater than an absolute value of a negative peakvalue of the inductor current Izvs. When the amount of inductor currentIzvs flowing during the dead time DT varies, the inverter 123′ maynon-uniformly operate. Accordingly, the amount of current of theinductor current Izvs flowing during the dead time DT is preferablyuniform.

As an example, in FIG. 27 , one freewheeling cell may include one periodin which the output voltage VO has a ground level. FIG. 27 shows threepowering cells and freewheeling cells. As another example, onefreewheeling cell may include one period in which the output voltage VOhas a high level and a low level, and one period in which the outputvoltage VO has a ground level. FIG. 27 shows three freewheeling cells.

FIG. 28 illustrates another example of a variation in an inductorcurrent Izvs when an output voltage VO has a freewheeling period.Referring to FIGS. 1, 25, and 28 , a powering period of a half cycle anda freewheeling period of a half cycle may be alternately arranged. InFIG. 28 , a positive peak value and a negative peak value of theinductor current Izvs match each other.

However, when the output voltage VO has a negative value, the outputcurrent IO has a positive value. Power is supplied from the load 140 tothe inverter 123 when the output voltage VO and the output current IOhave phases opposite to each other, which may result in unnecessarypower consumption and may cause the load 140 to be turned off.Accordingly, the phases of the output voltage VO and the output currentIO preferably have the same sign.

As an example, in FIG. 28 , a freewheeling cell may include a half-cyclein which the output voltage VO has a high level, a half-cycle in whichthe output voltage VO has a ground level, a half-cycle in which theoutput voltage VO has a low level, and a half-cycle in which in whichthe output voltage VO has a ground level. For example, FIG. 28 may showthree freewheeling cells.

FIG. 29 illustrates another example of a variation in an inductorcurrent Izvs when an output voltage VO has a freewheeling period.Referring to FIGS. 1, 25, and 29 , a single freewheeling cell may havefour cycles. Two freewheeling cells are shown in FIG. 29 .

A freewheeling cell includes one cycle in which the output voltage VOhas a high level and a low level, one cycle in which the output voltageVO is in a ground level, one cycle in which the output voltage VO is ina high level and a ground level, and one period in which the outputvoltage VO is in a ground level and a low level. A positive peak valueand a negative peak value of the inductor current Izvs match each other.Additionally, a sign of the output voltage VO and a sign of an outputcurrent IO match each other.

As illustrated in FIG. 29 , a controller 125 may control a frequency fswof the output voltage VO such that the frequency fsw of the outputvoltage VO and a resonant frequency f0 of a load 140 match each other.Zero voltage nearly zero current switching (ZVZCS) may be achieved byinductors an inductor Lzvs. Also the controller 125 may controlfreewheeling cells such that a positive peak value and a positive peakvalue of the inductor current Izvs match each other. The controller 125may control freewheeling cells such that the sign of the output voltageVO and the sign of the output current IO match each other.

FIG. 30 illustrates an inverter 123″, an impedance matching circuit 130,and a load 140 according to an application example of the presentdisclosure in more detail. Referring to FIGS. 1 and 30 , the inverter123″ includes first and second transistors TR1 and TR2, first and seconddiodes D1 and D2, and first and second capacitors C1 and C2. Theimpedance matching circuit 130 includes a capacitor C, and the load 140may be modeled as an inductor Lpla and a resistor Rpla.

As compared to the inverter 123 in FIG. 2 , in the inverter 123″ in FIG.30 , a first capacitor C1 is disposed instead of the third transistorTR3 and the third diode D3 and a second capacitor C2 is disposed insteadof the fourth transistor TR4 and the fourth diode D4. Each of the firstand second capacitors C1 and C2 has a capacitance high enough to have aboth end voltage that is substantially direct current (DC). The inverter123″ in FIG. 30 may be a half bridge type having half the output voltagerange and having half a switch and switching signals, as compared to theinverter 123 in FIG. 2 .

The inventive concept of the present disclosure for adjusting thepowering period and the freewheeling period described with reference toFIG. 14 to FIG. 24 may be identically applied to the inverter 123″ inFIG. 30 . Additionally, as described with reference to FIG. 25 , theinductor Lzvs may be applied to the inverter 123″, similarly to theinverter 123′. Moreover, the power control (or supply) method describedwith reference to FIGS. 26 to 29 may be identically applied to theinverter 123″ in FIG. 30 .

As described above, according to the present disclosure, patterns ofswitching signals provided to an inverter of a power supply may beadjusted to control the amount of power or current supplied to a load.Thus, a power supply and a method of supplying power are provided withimproved performance without increasing complexity and causinghigh-frequency switching noise and stress.

Although the present disclosure and its advantages have been describedin detail, it should be understood that various changes, substitutionsand alterations can be made herein without departing from the spirit andscope of the disclosure as defined by the following claims.

What is claimed is:
 1. A power supply comprising: an inverter configuredto convert direct current (DC) power into alternating current (AC)power, wherein the inverter comprises two output nodes such that the ACpower is supplied to a load via the two output nodes, and wherein theinverter further comprises an inductor which is electrically connectedbetween the two output nodes; and a controller configured to:periodically determine a next cell to be a powering cell or afreewheeling cell, adjust a total length of a freewheeling period in thefreewheeling cell for controlling the power supplied to the load, andcontrol the inverter according to the determined cell configuration,wherein the powering cell consists of only powering period, wherein thefreewheeling cell comprises a powering period and a freewheeling period,at least one of a positive voltage and a negative voltage being outputduring the powering period and both of a positive voltage and a negativevoltage being not output during the freewheeling period, and wherein thefreewheeling cell is configured that i) absolute value of a positivepeak of a current of the inductor is to be matched to an absolute valueof a negative peak of the current of the inductor, and ii) a totallength for the positive voltage in the freewheeling cell is to beidentical to a total length for the negative voltage in the freewheelingcell such that a damage to the at least one first switch and the atleast one second switch can be minimized while adjusting the powersupplied to the load using the freewheeling cell.
 2. The power supply asset forth in claim 1, wherein the controller is further configured to:obtain a current power amount supplied to the load, and increase thefreewheeling period when the obtained power amount is greater than atarget power amount.
 3. The power supply as set forth in claim 1,wherein the controller is further configured to: obtain a current poweramount supplied to the load, and decrease the freewheeling period whenthe obtained power amount is smaller than a target power amount.
 4. Thepower supply as set forth in claim 1, wherein the controller is furtherconfigured to: obtain a current power amount supplied to the load, andincreases or decreases the freewheeling period periodically until theobtained power amount becomes equal to a target power amount.
 5. Thepower supply as set forth in claim 1, wherein the controller is furtherconfigured to: obtain a current power amount supplied to the load,detect a difference between the obtained power amount and a target poweramount, and adjust the freewheeling period according to the detecteddifference such that the obtained power amount becomes equal to thetarget power amount.
 6. The power supply as set forth in claim 1,wherein the controller is further configured to limit a length of eachof freewheeling periods in the freewheeling cell to a threshold value orless, and wherein the controller is further configured to calculate thethreshold value depending on a quality factor of the load and a periodof the AC power.
 7. The power supply as set forth in claim 1, whereinthe load is an inductively coupled plasma (ICP).
 8. The power supply asset forth in claim 1, wherein one of the two output nodes is a firstoutput node and the other of the two output nodes is a second outputnode, wherein the inverter comprises: a first transistor and a firstdiode coupled in parallel between a power supply node and the firstoutput node; a second transistor and a second diode coupled in parallelbetween the first output node and a ground node; a third transistor anda third diode coupled in parallel between the ground node and the secondoutput node; and a fourth transistor and a fourth diode coupled inparallel between the power supply node and the second output node, andwherein the controller is configured to control respective voltages ofgates of the first to fourth transistors.